Supercritical CO2extraction of porogen phase: An alternative route to nanoporous dielectrics
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چکیده
منابع مشابه
Supercritical CO2 Extraction of Porogen Phase: An Alternative Route to Nanoporous Dielectrics
We present a supercritical CO 2 (SCCO 2) process for the preparation of nanoporous organosilicate thin films for ultra low dielectric constant materials. The porous structure was generated by SCCO 2 extraction of a sacrificial poly(propylene glycol) (PPG) from a nanohybrid film, where the nanoscopic domains of PPG porogen are entrapped within the crosslinked poly(methylsilsesquioxane) (PMSSQ) m...
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ژورنال
عنوان ژورنال: Journal of Materials Research
سال: 2004
ISSN: 0884-2914,2044-5326
DOI: 10.1557/jmr.2004.0413